Apparatus for continuously depositing a layer of a solid material on the surface of a substrate heated to a high temperature

ABSTRACT

By means of the nozzle, three gaseous curtains are formed converging on the surface of the substrate heated to a temperature of about 600° C. which is driven in translatory movement, the intermediate curtain being constituted by a gaseous reactant or a reactant diluted in a carrier gas and the two lateral curtains being constituted by another naturally gaseous reactant or reactant diluted in a gas. The gaseous products of the reaction issuing from the nozzle are compelled to flow above a predetermined region of the substrate and these products are evacuated by suction by means of channels disposed at the extremities of this region of the substrate and a pump to which the channels are connected.

This is division of application Ser. No. 117,086, filed Jan. 31, 1980now U.S. Pat. No. 4,294,868.

Various processes and devices have already been proposed for coating asubstrate, for example a glass plate, with a layer of a semiconductormaterial, for example tin oxide, which layer must at the same time havea transparency rather similar to that of the substrate, a relatively lowelectrical resistance and a high mechanical strength.

Thus, among other processes, it has been attempted in particular to makeuse for this purpose of the method known under the English designationChemical Vapor Deposition or C.V.D. More particularly, from the paper byH. Koch entitled: "Elektrische Untersuchungen an Zinndioxydschichten"("Electrical Investigations on Stannic Oxide Layers") (see Phys. Stat.1963, Vol. 3, pages 1059 and following) a process and a device are knownfor depositing a thin layer of SnO₂ on a glass plate by reacting SnCl₄and H₂ O supplied in diluted form in a carrier gas, in this case air,and brought in mutual contact with the surface of the glass platepreviously heated to a temperature of the order of 200° to 400° C. Thesetwo gaseous reactants are projected on the glass by means of a nozzlewith two coaxial jet ducts, the central duct of which carries thegaseous dilution of SnO₂, whilst the outer duct is fed with the gaseousdilution of H₂ O.

A process and an apparatus very similar to the foregoing have also beenproposed, in particular in German patent application No. 2,123,274,published prior to examination, which in addition makes possible dopingwith antimony of the SnO₂ -layer deposited on a substrate, in this casealso a glass plate, in order to reduce the electrical resistivity ofthis layer. To this end, there was employed in addition SbCl₃ indilution in a carrier gas, in this case nitrogen, which was brought intocontact with SnCl₄ and H₂ O above the substrate, by means of a nozzlewith three coaxial jet ducts each receiving one of the above components.The combining reaction is thus effected in proximity to the substrateand at a certain distance from the three jet ducts of the nozzle.

In both of the above-cited cases, the processes and devices concernedare designed solely for coating with a doped or undoped SnO₂ -layerplatelets of relatively small dimensions on which this coating iseffected by relative longitudinal displacement of the nozzle and theplatelets. The deposit obtained therefore has the form of a stannicoxide strip of rather uneven transparency over the length of this strip.In fact, the mixture of the reactants emerging from a nozzle of the typedescribed is not perfectly homogenous, so that the deposit obtained hasregions of differing thickness and composition in the form of streaksextending parallel to the axis of relative movement executed by thenozzle and the substrate.

It is opportune to note here that, even if the processes and devicesdescribed above are acceptable where it is a matter of coatingsubstrates of relatively small dimensions, they prove to be practicallyunusable where a large-scale industrial operation is concerned, relatedto the coating of particularly large substrates, as is for example thecase of practically endless strips of glass, which may have a width ofseveral meters, such as those obtained by the so-called "float" process.

Indeed, if it were intended to employ for such an application theaforecited processes and devices, it would be necessary either todispose side by side, over the entire width of the glass strip, aplurality of the nozzles of the type described, and it is easy toimagine the complexity of the installation which would be involved, orto employ only a limited number of nozzles which a mechanism would haveto drive above the strip in a very rapid alternating movement transverseto the axis of movement of the strip to ensure the coating of the wholeof the strip surface. It is obvious that neither of these solutionswould allow to obtain a SnO₂ --coating sufficiently homogenous to offerat the same time low electrical conductivity, the transparency and thegeneral high-quality aspect desired in the finished product. If, forexample, the latter is a glass intended for use either in themanufacture of windows or doors of buildings or of windows orwindscreens of vehicles of all kinds, it is easily understood that suchqualitites are highly desirable.

To these should be added further the ability of the desired SnO₂ layersof not impeding the mechanical or thermal treatment to which the glasssheets are usually subjected. In particular, it is necessary that suchsheets of glass, coated with doped or undoped SnO₂, may be cut withdiamond by acting on one face or the other, without impairing thequalities of the SnO₂ -layer. Similarly, it would be necessary to havethe facility of subjecting the glass sheets obtained by cutting to atempering operation, without mechanical or optical deterioration of itscoating. Lastly, it would be desirable to be able to effect the warmbending of such sheets, especially in the manufacture of windscreens orrear windows of cars, for example, again without modifying thepreviously mentioned qualities of low electrical resistivity, goodmechanical properties, good transparency and a light reflection ashomogenous as possible over the entire area of the sheets.

The totality of these requirements cannot be satisfied by using theprocesses or devices of the described type, that is to say, those whichallow to treat individually only a very small glass surface.

It is probable that concerns of the aforecited nature have led to thereplacement of the processes and devices described by those processesand devices which are in particular the subject matter of U.S. Pat. Nos.3,850,679 and 3,888,649, and of British Pat. No. 1,507,996.

In these publications as a whole, there is employed generally a devicefor distributing the previously prepared reactive gases in which thesegases are directed at the surface of the glass sheet simultaneously overthe entire width of this sheet, in the form of two successive curtainsas in the first two Patents, and in the form of a gas stream orientedtangentially to the glass over a preset length of the sheet, in thethird Patent.

However, these devices cannot be suitable for the application of theC.V.D. processes mentioned previously, designed for the deposition ofdoped or undoped SnO₂ -layers, because the arrival of a gaseous mixtureof SnCl₄ and H₂ O in proximity of the distributor orifice of thesedevices would lead to a premature and violent reaction of thesecomponents, taking into account the relatively high temperature,practically the same as that of the glass to be coated (of the order of400° C.), of the walls of the devices defining this orifice. Owing tothis, two additional drawbacks would result, namely, on one hand, a moreor less extensive clogging of the exhaust orifice of the distributordevices and, on the other hand, the formation on the glass of aparticularly inhomogenous SnO₂ -deposit, with the attendant greatlydiffering electrical, mechanical or physical properties.

The purpose of the present invention is precisely to provide anapparatus for continuously depositing on the surface of a substrateheated to a high temperature a layer of a solid material resulting fromthe reaction of at least two gaseous reactants or reactants diluted in agas, which make it possible to avoid all the drawbacks and defectsmentioned above.

The process carried out by this apparatus is characterised in that thesaid streams have the form of rectilinear gas curtains, the transverseprofile of each converting toward an imaginary edge common to allstreams, that these curtains and/or the substrate are disposed in such amanner that said edge is contained substantially in the plane of thesaid surface of the substrate, that the gases evolving from the reactionwhich results from the impact of said streams on the substrate arecompelled to flow above a predetermined portion of this substrateextending on either side of said edge and, lastly, that these gases areevacuated at the extremity of said substrate portion located oppositethe said imaginary common edge of said curtains.

In a particular mode of execution of this process, the gaseous curtainsare three in number in tangential contact by pairs, the central curtainbeing formed by the stream of the first reactant and the two lateralcurtains by the stream of the other reactant.

When this process is applied to deposit on a substrate, in particular asheet of glass heated to high temperature, of the order of 600° C. forexample, a layer of SnO₂ by reaction of liquid SnCl₄ and H₂ O-vapourdiluted in an inert carrier gas, such as nitrogen, the central gaseouscurtain will be constituted by the gaseous dilution of SnCl₄, the twolateral curtains being formed by the dilution of water vapour. Thesubject of the present invention is the apparatus for carrying out thedescribed process and it comprises

a source for a first gaseous reactant or reactant diluted in a carriergas,

a source for a second gaseous reactant or reactant diluted in a carriergas,

a nozzle with three jet ducts each having an aperture constituted by arectilinear slot and in which the lateral walls delimiting thelongitudinal edges of each slot converge toward a line common to all jetducts, a first among these jet ducts adjoining, with a firstlongitudinal edge of its exhaust aperture, a longitudinal exhaustaperture edge of a second jet duct and, with the second longitudinaledge of said aperture, a longitudinal edge of the exhaust aperture ofthe third jet duct,

a first and second deflecting surfaces, extending over a predeterminedlength to each side of said jet ducts from the second longitudinal edgeof the exhaust aperture of the second and third jet duct respectively,said deflecting surfaces being co-planar with each other and with thelongitudinal edges of the jet duct apertures of the nozzle and beingkinematically integral with this nozzle,

a first distributor network connecting the source of the first reactantwith the first jet duct of the nozzle,

a second distributor network connecting the source of the secondreactant with the second and third jet duct of the nozzle,

means for setting in relative movement the substrate and the nozzle in adirection substantially perpendicular to said imaginary line,

means for maintaining constant in the course of said relative movementthe distance separating the plane containing said jet duct apertures ofthe nozzle and said deflecting surfaces from the said surface of thesubstrate, this distance being substantially equal to that comprisedbetween the jet ducts of the nozzle and the said imaginary line,

at least one device for evacuating the reaction gases evolving in thespace comprised between said deflecting surfaces and the surface of thesubstrate, from the extremities of this space most remote from theapertures of said nozzles.

As will be seen in the following, the above process and installationmake it effectively possible to carry out the coating, at a very highspeed, of sheet or plate glass, with an SnO₂ -layer of excellenthomogeneity, guaranteeing very high performance levels with respect ofmechanical qualities and of electrical and optical properties of allkinds.

BRIEF DESCRIPTION OF THE FIGURES

The attached drawing shows, by way of example and very schematically, aform of embodiment of the installation being the subject of the presentinvention:

FIG. 1 is a general view.

FIGS. 1a and 1b are views similar to that of FIG. 1, in accordance withmodified forms of embodiment.

FIG. 2 is a partial perspective view, in vertical section on an enlargedscale, of an element of the installation in FIG. 1.

DETAILED DESCRIPTION OF THE FIGURES

The installation shown in the drawing is designed to deposit by theso-called C.V.D.-method on a substrate, in this case a sheet of glass Vheated to high temperature, a layer of stannic oxide SnO₂, by exploitingthe following chemical reaction:

    SnCl.sub.4 +2H.sub.O →SnO.sub.2 +4HCl

To this end, the installation comprises first of all a train of rollers1 on which the sheet V rests and moves in direction F, which rollers aredriven in anti-clockwise rotation by an electric motor (not shown) andwhich have, of course, a length compatible with the width of the sheetof glass to be carried. The speed of rotation of the rollers 1 will beso selected that the displacement of the sheet V is effected with alinear speed of some meters per minute, of the order of 1 to 10,according to each case.

Above this train of rollers 1, the installation shown has a nozzle 2,the basic structural profile of which is the subject of FIG. 2, to whichreference will be made from now on. This nozzle comprises in fact threeseparate jet ducts 3, 4 and 5, respectively, extending longitudinally ina direction parallel to the already mentioned rollers 1, over a lengthcorresponding to the width of the glass sheet V. Thus, such jet ductscould have a length of several meters. As can be seen in the drawing,the jet ducts 3 to 5 are formed by assembly of elongated sectionalshapes 6a and 6b, 7a and 7b, 8a and 8b, which are in turn fastened, byany suitable means, to two pairs of profiled elements 9a and 9b, 10a and10b, respectively, delimiting between each other ducts 11, 12 and 13communicating with the jet ducts 3, 4 and 5, respectively.

The lateral walls 3a and 3b, 4a and 4b, 5a and 5b of the jet ducts 3 to5 converge toward a common line l located at a distance from the planecontaining the inner face of the sections 6a and 6b of the order of 3 to6 mm, for example. Furthermore, the exhaust apertures of the blast pipes3, 4 and 5, which are in the shape of three oblong slots extending overthe entire length of the sections 6a, 7a, 7b and 6b, have a width ofsome tenths of a millimeter, for example 1/10 or 2/10.

The width of the lower face of sections 6a and 6b will be preferablycomprised between 10 and 20 times the total width of the exhaust slotsof jet ducts 3 to 5.

Preferably, but not exclusively, this lower face of sections 6a and 6bwill be covered with a layer of a chemically inert metal or an alloy ofsuch metals or again of metal oxide. By way of example, the metal couldbe gold or platinum. The oxides could be selected among SnO₂, SiO₂ orAl₂ O₃.

In fact, the usual metals and alloys, such as steel or brass have, inthe presence of hydrogen, catalytic properties which could perturb thecontrol of the desired reaction to obtain a deposit of SnO₂ having thedesired mechanical, physical and optical qualities. The reason for thepresence of hydrogen will be explained in the following.

It is of course understood that the assembly of the sectionsconstituting the nozzle 2 is covered, at each extremity, by a coverplate, not shown, mounted so as to ensure total fluid-tightness and toform in this manner the jet ducts 3, 4 and 5 and the ducts 11, 12 and 13which are to be well sealed laterally. The channels 14a and 14b formedin the upper part of sections 10a and 10b, over the entire length of thelatter, make it possible to establish a circulation of a fluid, forexample oil, intended to maintain the nozzle 2 at an optimum operatingtemperature.

Another plate 15 covers the upper face of nozzle 2 over its whole areaand in a fluid-tight manner, thus preventing any communication betweenthe ducts 11, 12 and 13.

It will be noted further that the general profile and the surfacequality of the walls delimiting not only the jet ducts 3 to 5 but alsothe ducts 11 to 13 as well as the transverse sections of the latter aresuch, that for gas flow rates of the order of 3 to 6 l/h per centimeterof nozzle length the flow at the outlet of the nozzles will be of"laminar" type.

To either side of the nozzle 2, and over the entire length of thelatter, the installation shown comprises two suction channels 16 and 17(FIGS. 1 and 2), of straight square section and the lower face of whichis coplanar with the lower face of the sections 6a and 6b previouslydescribed. These channels each have two longitudinal slits, 16a and 16bfor channel 16, 17a and 17b for channel 17, respectively. These channelsare connected, by a conduit system 18, to the intake of a suction pump19 connected, with its outlet, to the bottom of a scrubbing tower 20filled with refractory materials (Raschig rings).

In addition, the installation shown comprises two thermostat-controlledbubble tanks 21 and 22, the first containing liquid stannic chloride,SnCl₄, and the other water, two flowmeters 23 and 24 having aflow-regulating valve, 23a and 24a, fed with a mixture of nitrogen andhydrogen in 60/40 ratio, two valves 25 and 26 fitted on the pipes 27 and28 connecting the flowmeters to the bubble tanks mentioned above. Twoconduits 29 and 30 connect the outlet of the vessels 21 and 22respectively to the duct 13 and to the ducts 11 and 12 of the nozzle 2,that is to say, in fact to the jet duct 5 of this nozzle, for theconduit 29, and to the jet ducts 3 and 4, for the conduit 30.

The conduits 29 and 30 pass through an enclosure E₁, illustratedschematically by a contour drawn in composite lines, containing aheating liquid, for example oil, maintained at a constant temperature ofabout 110° C. by any suitable means.

The installation described in the foregoing makes it possible to coat,for example, a glass plate with a layer of stannic oxide having athickness of the order of 500 nm, having at the same time a very goodtransparency, a relatively low electrical conductivity and a highmechanical strength and resistance to acids.

An experimental installation of this type, fitted with a 20 cm longnozzle in which the aperture of the jet ducts 3, 4 and 5 had a width of0.1-0.1 and 0.2 mm, allowed to treat a glass plate of 20 cm width and 4mm thickness heated to about 600° C. and driven in the direction F(FIGS. 1 and 2) with a velocity of 2 m/min. The distance separating thelower face of the nozzle and the surface of the glass was 6 mm.

The vessels 21 and 22 employed had respective capacities of 200 ml forliquid SnCl₄ and 300 ml for H₂ O. These vessels were heated to suchtemperatures that, for a carrier gas flow rate of 60 l/h N₂ /H₂ forvessel 21 and 120 l/h for vessel 22, the flow rates being controlled byoperation of valves 23a and 24a, there was obtained a flow rate ofreactant diluted in this gas of 2 mol/h stannic chloride, SnCl₄, and 1mol/h H₂ O. In addition, the temperature of the nozzle was maintained atapproximately 110° C. by circulation of the oil in the channels 14a and14b of the latter (FIG. 2).

Taking into account the profile given to the jet ducts 3, 4 and 5 ofnozzle 2, and in particular the fact that they converge with theirlateral wall toward a common line l, the gaseous streams which issuefrom these mouthpieces, SnCl₄ -stream from jet duct 5, and H₂ O-vapourfrom jet ducts 3 and 4, which are laminar, enter into mutual contactfirstly by touching each other tangentially then more and more directlyas the line "l" is approached. Of course, the combined flow of thesethree gaseous streams becomes less and less laminar in the measure asthese three streams interpenetrate. However, the latter takes place infact only in the immediate proximity of the surface of the glass V,which, as stated, is heated to about 600° C., so that the combiningreaction

    SnCl.sub.4 +2H.sub.2 O→SnO.sub.2 +4HCl

occurs on the glass. It is opportune to remark at this point that, if noparticular measures were taken, this reaction would occur in a veryviolent manner with production of a very large quantity of stannic oxideSnO₂ and of hydrates of the type SnO₂.nH₂ O at the outlet of the jetducts 3 to 5 of nozzle 2, with the risk of partial or total clogging ofthe jet ducts, and a deposition of these same oxides on the glass in theform of a white precipitate and not in the form of the desiredtransparent semiconductor layer.

With the above-described installation, this risk was eliminated byadding a reducing agent to the gaseous streams of SnCl₄ and H₂ O-vapourin the form of H₂, incorporated into the carrier gas. Hydrogen does infact not react with either SnCl₄ or H₂ O. Moreover, it acts as acatalyst. It can therefore be used as an inert carrier gas.

The combining reaction of SnCl₄ and H₂ O occurs not only in the centralregion of the nozzle 2, that is to say in proximity to that part of thisnozzle into which open the jet ducts 3, 4 and 5. In fact, this reactiontakes place when the pump 19 operates in such a manner, that, by thechannels 16 and 17 disposed to either side of the nozzle, there isformed an underpressure at the right-hand and left-hand extremities, inthe drawing of the space comprised between the glass plate V and thelower face of sections 6a and 6b of the nozzle. Owing to this, there isformed in this space a gas flow moving from the central portion of thisspace towards the channels 16 and 17 already mentioned. This streamcontains above all a portion of the SnCl₄ and H₂ O dispersed in thecarrier gas and as yet unreacted, the already formed HCl-vapours, and acertain quantity of carrier gas free from the reactants which havealready reacted. Thus, the reaction between SnO₂ and H₂ O can continuewith the residual reactant gases over a certain length, to either sideof the line "1" of convergence of the jet ducts.

The power of the suction realized with the channels 16 and 17 isselected in such a manner that the reactive gases issuing from thenozzle 2 do not reside in this space longer than the time strictlynecessary for obtaining a deposit of SnO₂ on the glass, which depositappears in the form of a transparent layer and not in the form of anaccumulation of powdery SnO₂. Of course, the suction must not be toostrong, because otherwise the reactive gases issuing from the nozzlewould not have the time to reach the surface of the glass. The intensityof the suction is therefore of critical importance with regard to thequality and the rate of growth of the layer. It will be noted inaddition that, by means of this suction, in a manner of speaking thespace comprised between the nozzle and the glass plate, in which spacethe desired reaction takes place, is insulated from the ambientatmosphere, preventing, on the one hand, any possible penetration intothis space of additional moisture capable of influencing the combinationreaction whilst preventing, on the other hand, any leakage to this sameambient atmosphere of noxious vapours, for example HCl or hydrogen, theambient air tending to flow towards the slots 16a and 16b, 17a, 17b,respectively, passing between the channels 16 and 17 respectively, theglass plate V and the nozzle 2.

The gaseous products drawn off by pump 19 are directed, as stated, tothe scrubbing tower 20, so that the residual volatile acids percolateand are entrained by the water, the resulting acid solution beingseparated from the scrubbed gases and evacuated through the conduit 20a.

With the operating conditions described above, the reaction yield hasabout 70%. The glass was coated over the whole of its surface with aSnO₂ -layer, having a thickness of 500 nm, a transparency of 90 to 95%according to sample and a mean conductivity R.sub.□ =200Ω.

Moreover, the SnO₂ -layer thus obtained was found to be of aparticularly high hardness, greater than that of the glass on which ithas been deposited. Accordingly, it had a great resistance, be it to themost intense mechanical stresses, for example to impact, or to acids. Inparticular, this glass could be subjected to a bending operation with aradius of curvature of 15 cm, after being heated to a temperaturebetween 600° and 700° C., without any deterioration in the SnO₂-coating. It was also possible to temper it under the usual conditionsapplying to conventional glass. Lastly, it is to be noted that a glassplate coated with a SnO₂ -layer in the conditions and by the methoddescribed, can be cut with diamond on either face without splintering ofthe coating.

With this same installation, and operating conditions differing fromthose indicated only in the velocity of advance of the plate V, thisvelocity having been raised to approximately 10 m/min, there wasobtained an SnO₂ deposit having a thickness of approximately 10 nm, amean conductivity R.sub.□ =1.5 KΩ, a transparency of almost 100% forvisible radiation and mechanical properties practically equivalent tothose of the layer obtained by advancing the glass plate at a speed of 2m/min.

The installation described in the foregoing can also be employed todeposit, by C.V.D., a layer of TiO₂ on a glass plate. To this end, itsuffices to replace in the bubble tank 21 the stannic chloride SnCl₄with titanium tetrachloride TiCl₄. It would also be possible to employ acarrier gas constituted solely by nitrogen.

The reaction which will take place at the outlet of nozzle 2 will be asfollows:

    TiCl.sub.4 +2H.sub.2 O→TiO.sub.2 +4HCl

A glass plate of 20 cm width and 4 mm thickness, heated to a temperatureof 600° C., was displaced longitudinally at a rate of 2 m/min in frontof a nozzle 2, at a distance of 6 mm from the latter. By operating thevalves 23a and 24a, the flow rate of the carrier gas was adjusted to 60l/h for the flowmeter 23 and to 120 l/h for the flowmeter 24. Inaddition, the vessels 21 and 22 were heated to achieve reactant flowrates of 0.2 mole/h TiCl₄ and 0.01 mole/h H₂ O.

There was obtained a TiO₂ layer of 0.01 μm thickness, having atransparency of about 75% to visible light and a reflecting power forthis same visible light of the order of 50%, that is to say, greaterthan the glass bearing the deposit. The mechanical strength wascomparable to that of a SnO₂ -layer obtained in the manner described.

The direct addition of H₂, in order to attenuate the violence of thecombination reaction between SnCl₄ and H₂ O-vapour, is not the onlypossible measure. According to a modified mode of execution of theprocess according to the invention, it is possible to make use of acarrier gas constituted exclusively by nitrogen and to produce in situthe hydrogen necessary for the reduction, from methanol, CH₃ OH. FIG. 1ashows how the installation already described (FIG. 1) is to be modifiedin this case.

As shown, the new installation must comprise and additional bubble tank31, containing the methanol, a flowmeter 32 with its flow-control valve32a, a valve 33 located on a pipe 34 connecting the flowmeter 32 to thevessel 31 and lastly a conduit 35, connecting the outlet of this vesselto the conduit 30 and thus, to the ducts 11 and 12 of nozzle 2, andthereby to the outer jet ducts 3 and 4 of the latter.

The conduits 29, 30 and 35 pass through an enclosure E₂, indicatedschematically by a contour drawn in composite lines, containing aheating liquid, for example oil, kept at a constant temperature of about110° C. in any suitable manner.

When brought into the presence of SnCl₄, the methanol can react with thelatter in the following manner:

    SnCl.sub.4 +2CH.sub.3 OH→SnO.sub.2 +2HCl+2CH.sub.3 Cl

Furthermore, taking into account the relatively high temperatureprevailing at the outlet of the jet ducts, the methanol can decomposeaccording to the reaction

    CH.sub.3 OH→2H.sub.2 +CO

It can also react with H₂ O according to the reaction:

    CH.sub.3 OH+H.sub.2 O→3H.sub.2 +CO.sub.2

In either case, there is thus ensured the in situ production of thehydrogen necessary for controlling the already mentioned essentialreaction:

    SnCl.sub.4 +2H.sub.2 O→SnO.sub.2 +4HCl

It is opportune to remark that the experiments have not permitted todetermine which of the three above reactions of CH₃ OH had procedence.It has nevertheless been noted that, in the operating conditionsdescribed in the following, the introduction of methanol into theprocess of depositing the desired SnO₂ layer effectively made itpossible to control this process in the same manner as in the case wherethe hydrogen was mixed to the nitrogen as carrier gas (FIG. 1).

To obtain, with the pilot installation already described and modified bythe addition of the elements required by this mode of execution, a glassplate of 20 cm width and covered with a transparent SnO₂ -layer, througheach of the three vessels 21, 22 and 31 a flow of about 60 l/h nitrogenis passed, all flow rates being controlled by operation of the valves23a, 24a and 32a with which are equipped the flowmeters 23, 24 and 32.These vessels were heated to suitable temperatures to effect that theirflow rates of the corresponding reactant are respectively 1 mole/h ofSnCl₄, 1 mole/h H₂ O and 0.5 mole/h CH₃ OH. As previously, thetemperature of the nozzle, maintained by oil circulation, was 110° C.,whilst the glass plate was preheated to a temperature of about 600° C.The glass was driven in the direction F at a velocity of 2 m/min.keeping it at a distance of 6 mm from the lower face of sections 6a and6b constituting the nozzle.

The SnO₂ -coating obtained was found to be practically identical inthickness, quality and mechanical, electrical or physical properties tothe similar coating obtained with the aid of the installationillustrated with reference to FIG. 1.

The variant of the installation which is the subject of FIG. 1b is moreparticularly designed for producing antimony-doped SnO₂ -layers, byreplacing certain tin atoms with Sb. It is known in fact that by meansof such doping, it is possible in particular to obtain a relativelysubstantial reduction of the resistivity of the layer.

Such doping can be obtained by carrying out the following reaction:

    2SbCl.sub.5 +5H.sub.2 O→2Sb.sub.2 O.sub.5 +HCl

which makes it possible accessorily to introduce antimony ions into thecrystal structure of SnO₂.

Since the antimony chloride reacts with water but not with stannicchloride, the installation according to FIG. 1b is embodied in such amanner that the SbCl₅ only comes into contact with H₂ O at the outlet ofnozzle 2, whilst being mixed with stannic chloride, SnCl₄. Thus theabove reaction takes place simultaneously with that of the combinationof SnCl₄ and H₂ O-vapour.

The new installation differs from that of FIG. 1 by the addition of abubble tank 36, containing the liquid antimony chloride SbCl₅, aflowmeter 37 with control valve 37a, and lastly a conduit 40 connectingthe outlet of this vessel to conduit 29, and thus to the centraljet-duct 5 of the nozzle through the duct 13 of the latter (FIG. 2);also, a pipe 39 carries a valve 38.

The conduits 29, 30 and 40 pass through an enclosure E₃, illustratedschematically by a contour drawn in composite lines, containing aheating liquid, for example oil, maintained at a constant temperature ofabout 110° C. in any suitable manner.

A pilot installation of this type, fitted with a nozzle having the samefeatures as those of the nozzle of the pilot installation alreadydescribed, mounted in accordance with the diagram of FIG. 1, made itpossible to coat a glass plate of 20 cm width and 4 mm thickness with adeposit of antimony-doped SnO₂ of 500 nm thickness. Essentially, theoperating conditions were as follows:

The glass was heated to a temperature of 600° C. approximately and wasdisplaced longitudinally at a distance of 6 mm from the nozzle with avelocity of 2 m/min. The carrier gas used was a mixture of nitrogen andhydrogen N₂ 40% H₂ and the flow rates of this gas were adjusted, byoperating the valves 23a, 24a and 33a, to the following values: 60 l/hfor the vessel 21 containing the liquid SnCl₄, 60 l/h for the vessel 22containing H₂ O and 20 l/h for the vessel 36, containing the liquidSbCl₅. Moreover, the vessels were heated so as to obtain reactant flowrates, respectively, of 2 mole/h SnCl₄, 2 mole/h H₂ O and 0.1 mole/hSbCl₅.

There was obtained a doped SnO₂ layer having a resistivity R.sub.□ ofthe order of 70Ω and a transparency of 60%. The other properties, suchas mechanical strength, impact resistance, tear resistance, acidresistance and suitability for thermal treatment such as tempering ofthe coated glass were equivalent to those of the undoped SnO₂ -layersdeposited in the manner already described. Its reflecting power waspractically the same as that of the glass on which the layer has beendeposited.

With this same installation and under operating conditions differingfrom those indicated above only with regard to the speed of advance ofthe plate V, which velocity was raised to about 10 m/min, there wasobtained a deposit of antimony-doped SnO₂ having a thickness ofapproximately 10 nm, a mean conductivity R.sub.□ =500Ω, a transparencyof 80% in the visible spectrum and mechanical properties identical tothose obtained with the similarly antimony-doped SnO₂ deposit covering aglass plate displaced at a speed of 2 m/min.

Although the installation illustrated in FIG. 1b employs, by way ofreducing agent, hydrogen introduced into the carrier gas, namelynitrogen, it is obvious that it would be equally possible to conceive asimilar installation in which the reducing agent would be obtained frommethanol, CH₃ OH, as in the case of the form of embodiment shown in FIG.1a. Thus, the new installation would be a combination of theinstallations in FIGS. 1a and 1b, because it would comprise, in additionto the vessels 21 and 22 containing the SnCl₄ and water, respectively,vessels 31 and 36 containing, respectively, the CH₃ OH and the SbCl₅.These vessels would be connected to the nozzle 2 in the same manner asin the assemblies of FIGS. 1, 1a and 1b. On this assumption, the abovevessels would be fed with nitrogen at flow rates of 60 l/h, with theexception of the vessel for SbCl₅ which would receive only 20 l/h. Theheating temperatures of the vessels would be such that the followingreactant feed rates to the nozzle 2 would obtain: 1 mole/h for SnCl₄, 1mole/h for H₂ O, 2 mole/h for CH₃ OH and 0.1 mole/h for the SbCl₅.

The resistivity, the reflecting power and the transparency of the SnO₂-layers on the glass can be improved to a very great extent if theselayers are fluorine-doped layerrs. To this effect, preferably theinstallation described with reference to FIG. 1 will be used, augmentedby a cylinder 41 containing gaseous HF, and by a conduit 42 connectingthis cylinder to the conduit 30, the whole being shown in broken linesin the drawing.

A glass of 4 mm thickness, heated to a temperature of about 600° C., wascoated with a 900 nm thick layer of SnO₂, doped with fluorine by passingin front of the nozzle at a velocity of 2 m/min and at a distance of 6mm therefrom. The flow rates of the carrier gas (a mixture of N₂ 40% H₂)were of 60 l/h for the SbCl₄ and the water vapour. The flow rate of HFwas 0.1 l/min.

The flourine-doped SnO₂ coating was found to have particularly highperformance. In fact, its resistivity was R.sub.□ =20Ω, its reflectingpower in visible light greater than that of the supporting glass, andits infrared reflecting power was found to be particularly high, of theorder of 75%. Moreover, its transparency to visible light was 90%. Itsmechanical strength properties were also very pronounced: the glasscoated with fluorine-doped SnO₂ was able to undergo a thermal treatmentof tempering identical to those to which are traditionally subjectedcertain vehicle windows, for example the side windows of automobilevehicles. It was also possible to bend such a plate when hot(temperature approximately 650° C.) with curvature radii of 15 cmwithout modifying the properties of the doped SnO₂ coating. Moreover, aglass plate coated in the described manner could be worked in thetraditional fashion (cutting, grinding, etc, . . . ) without damage tothe coating. The layer of SnO₂ doped with F had in fact a hardnessgreater than that of the supporting glass and could not be scratched,while its chemical resistance to acids and its impact resistance werefound to be particularly high.

It is to be remarked further that a layer of SnO₂ doped with flourine orantimony deposited on a plate of glass in the conditions stated can becoated with silver or a silver paint deposited at 600° C., for examplein order to form electrical contacts. Such a silver coating adheres verywell to the surface of the SnO₂ layer.

With this same installation (FIG. 1b) and under operating conditionsdiffering from those indicated above only with respect to the speed ofadvance of the plate V, this speed having been raised to approximately10 m/min, there was obtained a fluorine-doped SnO₂ deposit having athickness of about 10 nm, a mean conductivity of R.sub.□ ≅200Ω, atransparency of almost 100% in the visible spectrum, aninfrared-reflecting power of 25% and mechanical properties identical tothose obtained with the SnO₂ -deposit also doped with fluorine bydisplacement of the glass plate at a velocity of 2 m/min.

Although the installation shown in FIG. 1, augmented by a cylinder 41containing gaseous HF and by a conduit 42 connecting this cylinder tothe conduit 30, uses by way of reducing agent hydrogen introduced intothe carrier gas (nitrogen), it is obvious that it would be equallypossible to conceive an installation making it possible to obtainfluorine-doped SnO₂ layers in which the reducing agent would be obtainedfrom methanol, CH₃ OH, as in the case of the form of embodiment of theinstallation illustrated in FIG. 1a. This new installation would thus bea combination of the installations of FIGS. 1 and 1a: it would appear inpractice as the installation of FIG. 1a with addition of the HF-cylinder41, connected to the conduit 30 by the conduit 42, all these beingelements already described previously with reference to the installationin FIG. 1 and illustrated in broken lines in this figure.

On these assumptions, the vessels 21, 22 and 31 would be fed withnitrogen at flow rates of 60 l/h, the flow rate of HF being 0.1 l/h.They would be heated to such temperatures that the flow rates of thereactants transported toward the nozzle 2 would be of 1 mole/h forSnCl₄, 1 mole/h for H₂ O and 2 mole/h for CH₃ OH.

In the conditions stated above, a glass of 4 mm thickness, heated to atemperature of about 600° C., was coated with a layer of 600 nm offluorine-doped SnO₂ by passing in front of the nozzle 2 which wasmaintained at a temperature of approximately 110° C. in the previouslydescribed manner, at a speed of 2 m/min and at a distance of about 6 mmfrom this nozzle.

The SnO₂ deposit thus obtained had a resistivity of about R.sub.□ =40Ω.The other features of physical, optical or mechanical nature remainedcomparable to the fluorine-doped SnO₂ coating obtained by directintroduction of the hydrogen into the carrier gas (installation inaccordance with FIG. 1, augmented by cylinder 41).

The uses of glass plates of all dimensions coated with a layer ofundoped SnO₂ or doped with antimony or fluorine can be of the mostdiverse kind, depending on their physical and electrical properties inparticular.

Although an undoped layer of SnO₂ has a relatively high resistivity whencompared with the resistivity of a similar layer doped with antimony orfluorine, a glass panel covered with such a layer can be used forexample to constitute windows or window-casing for dwellings, ships ortrains, in view of its good transparency to visible light and itsrelatively high infrared-reflecting power. In fact, such a plate has asufficient athermic capacity to reduce substantially the thermal sunrayslikely to pass through this panel.

This athermic capacity is obviously greater when a glass coated withantimony-doped SnO₂ or a glass coated with fluorine-doped SnO₂ isconcerned. Moreover, the resistivity of such layers being rather low inthe case of antimony-doped SnO₂ and very low in the case offluorine-doped SnO₂, it is possible to employ glasses coated with dopedSnO₂ as heating windows, for example as rear windows of cars.

It has moreover been observed that, when placed in a very humidatmosphere, a glass panel carrying a coating of SnO₂, doped withantimony or fluorine or not, does not cover itself with a uniform layerof mist but rather with a multiplicity of droplets, thus affecting to amuch lesser extent the visibility through the coating proper and theglass panel.

This property is obviously very advantageous in the case of glass panelsdesigned to form windows, notably car windows and especially windscreensand rear windows of cars, buses or vans.

Although in the preceding description reference was made to the forms ofembodiment of installations in which the glass plates to be coated witha layer of SnO₂, doped or not, are employs placed at a distance from thenozzle corresponding to the distance separating this nozzle and the edgeof convergence of the lateral walls of the three jet ducts of thisnozzle, it will be noted that, in practice, it will be possible toreduce slightly this distance in order to effect that the mixing of thereactants issuing from these blastpipes takes place on impact on theglass, producing a relatively intense local turbulence which promotesthis mixing.

Lastly, it will be noted that, although mentioned within the scope ofthe process and of the installations described with reference to FIGS.1, 1a, 1b and 2, of the attached drawings, the use of hydrogen as ameans for controlling the combination reaction of SnCl₄ and H₂ O couldalso take place, for the same purposes and with the same benefits, ifsuch a reaction were obtained by employing processes and installationsof different nature functioning in accordance with the C.V.D. method,such as those described by H. Koch in the previously cited paper or inthe German patent application No. 2 123 274 published prior toexamination.

We claim:
 1. Apparatus for continuously depositing on the surface of aheated substrate a layer of solid material formed from the reaction ofat least two reactants selected from gaseous reactants and reactantsdiluted in inert carrier gas, which apparatus comprises: a source of afirst gaseous reactant or reactant diluted in a carrier gas, a source ofa second gaseous reactant or reactant diluted in a carrier gas, a nozzlewith three jet ducts each having an exhaust aperture constituted by arectilinear slot and having lateral walls delimiting the longitudinaledges of each slot which walls converge towards a line common to allsaid jet ducts, a first of said jet ducts adjoining, with a firstlongitudinal edge of its exhaust aperture, a longitudinal exhaustaperture edge of a second said jet duct and, with the secondlongitudinal edge of its said aperture, a longitudinal edge of theexhaust aperture of the third jet duct, first and second deflectingsurfaces, respectively extending over a predetermined length to eachside of said jet ducts from the said second longitudinal edge of theexhaust aperture of the second and third jet duct respectively, saiddeflecting surfaces being coplanar with each other and with the saidlongitudinal edges of the exhaust apertures of the jet ducts of thenozzle and being kinematically integral with this nozzle, a firstdistributor network connecting the source of the first reactant with thefirst jet duct of the nozzle, a second distributor network connectingthe source of the second reactant with the second and third jet ducts ofthe nozzle, means for effecting relative movement of the substrate andthe nozzle in a direction substantially perpendicular to said imaginarycommon line, means for maintaining constant in the course of saidrelative movement the distance separating the plane containing saidexhaust apertures and said deflecting surfaces from the said surface ofthe substrate, and maintaining this distance substantially equal to thatbetween the jet ducts of the nozzle and the said imaginary line, and atleast one device for evacuating the reaction gases evolving in the spacebetween the said deflecting surfaces and the surface of the substrate,from the extremities of this space most remote from the said aperturesof said nozzle.
 2. Apparatus according to claim 1, in which the width ofeach of the slots constituting the exhaust apertures of the jet ducts ofthe nozzle is not less than 1/10 mm and not greater than 2/10 mm. 3.Apparatus according to claim 1, characterised in that the first andsecond deflecting surfaces are covered with a layer selected fromchemically inert metals and alloys of such metal.
 4. Apparatus accordingto claim 1, characterised in that the first and second deflectingsurfaces are covered with a layer of a chemically inert metal oxide. 5.Apparatus according to claim 2, characterised in that the first andsecond deflecting surfaces extend, to each side of the jet ducts of thenozzle, over a length which is 10 to 20 times greater than the width ofthe slots constituting the exhaust apertures of the jet ducts. 6.Apparatus according to claim 5, characterised in that the distanceseparating the said deflecting surfaces and the surface of the substrateis between 3 and 6 mm.